Education:

​

KAIST

BS, MS, and PhD, Materials Science and Engineering

1987–1996

Research: CVD Cu (PhD), CVD SiC (MS)

​

Experiences:

​

LG Semicon / Hyundai Electric Industries (now SK Hynix)

Member of Technical Staff

October 1996 – February 2001 (4 years 5 months) Cheongju, Chungcheongbuk-do, Korea / Icheon, Gyeonggi-do, Korea

Developed interconnect processes for 0.18um CMOS and 0.10um DRAM devices.

​

Stanford University

Visiting Scholar

November 1996 – December 1997 (1 year 2 months)

Copper/low-K integration

​

Consortium of Semiconductor Advanced Research (COSAR)

Vice Director

November 2007 – October 2012 (5 years) Seocho-gu, Seoul, Korea

Planning and evaluation of the national research programs on semiconductor equipment (supported by MOTIE)

​

Grenoble INP - Institut Polytechnique de Grenoble

Visiting Researcher

June 2015 – February 2016 (9 months) Grenoble Area, France

SIMAP Laboratory (Laboratoire de Science et Ingénierie des Matériaux et Procédés)

​

Lectures:

​

Semiconductor Processing (3 credits) - Since 2003. You can watch it on KOCW.

- CMOS process flow, wafer, cleanroom, cleaning, lithography, oxidation, diffusion & ion implantation, thin films, etching, interconnects, and memory device process flow.

​

Thin Film Processing (3 credits) - Since 2004. You can watch it on KOCW.

- Vacuum, plasma, PVD, Etching, CVD, ALD, electroplating, etc.

​

Semiconductor Materials (3 credits) - Since 2002. You can watch it on KOCW.

- Concentration, motion, generation & recombination of carriers; p-n junctions, diodes, and optoelectronic devices; MOS capacitors, MOS transistors, and memory devices.

​

List of courses for semiconductor companies:

BEOL (interconnect) Technology (2, 4, 15, or 23 hours) - Since 2004

CVD Process (2 or 4 hours) - Since 2004

Thermal ALD Process (2 or 4 hours) - Since 2001

Isotropic ALE Process (2 hours) - Since 2024

Semiconductor Processing (8, 15, or 20 hours) - Since 2013

Thin Film Processing, Advanced course (16 hours) - Since 2024

*Course hours and content can be customized upon request.