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Dr. Hye-Lee Kim

Research Professor

Everything about ALD and ALE including

- In vacuo XPS

- In situ FTIR

- DFT

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Dr. Tanzia Chowdhury

Postdoc Fellow

- Modeling and simulation of ALD and ALE reactions

- DFT

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Khabib Khumaini

Postdoc Fellow, Lecturer on leave 

- Modeling and simulation of ALE and ALD reactions

- Design of ALD precursors

- DFT, MD

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Yong R. Sriwijaya

Integrated Master-PhD Course

- Modeling and simulation of ALD reactions

- DFT

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Jian Heo

Master Course

- ALD of group III nitrides

- Device fabrication

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Misoo Kim

Master Course

- Reaction mechanism of ALD

- In situ FTIR

- DFT

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Sejeong Cho

Master Course

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Taeyoon Kwon

Undergraduate

- Modeling and simulation of ALD reactions

- DFT

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Seojin Cheon

Undergraduate

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Okhyeon Kim

PhD Course

- ALD of SiN, SiO2

- ALD of phase-change materials

- In situ QCM

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Changgyu Kim

Master Course

- Electrical characterization of thin films

- Remote plasma process

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Yoonho Choi

Master Course

- Area-selective deposition of metals

- In situ QCM

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Jaehwan Hong

Master Course

- ALE process development

- In situ QCM

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Muhammad H. Raihan

Master Course

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Hyungjin Song

Undergraduate

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Soyeon Lee

Administration

- R&D projects management

- Planning & strategy

© 2018 by Semiconductor Materials Lab, Sejong University, Seoul, Korea

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