Won-Jun Lee's Group
Semiconductor Materials Lab
Sejong University, Seoul, Korea
Won-Jun Lee, PhD
Professor at Sejong University, Seoul, South Korea
Since March 2001 – Present (21 years)
Research, development, and education on the materials, processing, equipment for semiconductor manufacturing.
Education:
KAIST
BS, MS, and PhD, Materials Science and Engineering
1987–1996
Research: CVD Cu (PhD), CVD SiC (MS)
Experiences:
Grenoble INP - Institut Polytechnique de Grenoble
Visiting Researcher
June 2015 – February 2016 (9 months) Grenoble Area, France
SIMAP Laboratory (Laboratoire de Science et Ingénierie des Matériaux et Procédés) http://simap.grenoble-inp.fr/
Consortium of Semiconductor Advanced Research (COSAR)
November 2007 – October 2012 (5 years) Seocho-gu, Seoul, Korea
Planning and evaluation of the national research programs on semiconductor equipment (supported by MOTIE)
Hynix Semiconductor (formerly, LG Semicon and Hyundai Electric Industries)
Member of Technical Staff
October 1996 – February 2001 (4 years 5 months) Cheongju, Chungcheongbuk-do, Korea / Icheon, Gyeonggi-do, Korea
Developed interconnect processes for 0.18um CMOS and 0.10um DRAM devices.
Stanford University
Visiting Scholar
November 1996 – December 1997 (1 year 2 months)
Copper/low-K integration
Members
Dr. Hye-Lee Kim
Senior Researcher
Everything about ALD including
- In-situ FTIR
- In-situ QCM
- DFT
Yewon Kim
PhD Course
- Atomic layer etching (ALE) process
- ALD of phase-change materials
- In-situ QCM
- DFT
Okhyeon Kim
PhD Course
- ALD of phase-change materials
- Atomic layer etching
- In-situ QCM
- DFT
Chahee Kim
Master Course
- Flexible electronics, interconnect system, hybrid bonding
- Finite element analysis (FEM)
- Computational fluid dynamics (CFD)
SATO AKIHIDE
Master Course
- In-situ QCM
- ALD of silicon oxide, metals
Yeonhwa Lee
Administration
- R&D projects management
- Planning & strategy
Tanzia Chowdhury
PhD Course
- Modeling and simulation of ALD and ALE reactions
- DFT
- ALD of silicon nitride
Khabib Khumaini
PhD Course
- Modeling and simulation of ALE and ALD reactions
- Design of ALD precursors
- DFT, MD
- Lecturer at Universitas Pertamina, Jakarta, Indonesia (on leave)
Heeju Son
Master Course
- Modeling and simulation of ALD reactions
- DFT
- in situ FTIR
- ALD of silicon oxide
Hyunmin Han
Master Course
- ALD of phase-change materials
- ALD of silicon oxide, high-k oxides
- I-V, C-V characterization
Soyeon Park
Master Course
- Hybrid bonding, interconnect system
- Finite element analysis (FEM)
Former members
Kwangchol Park
SK Hynix
PhD Dissertation (KAIST) : A Study on the Design and Characterization of Dielectric Multilayer Stacks Prepared by Atomic Layer Deposition Method (2009.8)
Byeol Han
SK Hynix
MS Dissertation : A Study on the Atomic Layer Deposition of Copper Seed Layer for Copper Interconnect of ULSI Devices (2009.2)
PhD Dissertation : A Study on the Atomic Layer Deposition of Ge-Sb-Te Compounds and its Tellurization Process for Phase Change Memory (2015.8)
Jae-Min Park
MS Dissertation : A Study on the Atomic Layer Deposition of Copper Nitride Film and its Application to seed layer of Copper Interconnect (2013.8)
PhD Dissertation : Reaction mechanism study on the atomic layer deposition of silicon nitride (2017.8)
Romel Hidayat
Assistant Professor at Sejong University, Korea
PhD Dissertation : Density functional theory study on atomic layer deposition of titanium oxide and tungsten (2022.2)
Sang-Wook Lee
MS Dissertation : Study on the Characteristics of Calcium Phosphate Thin Films Prepared by Pulsed Laser Deposition Method (2006.2)
Kee-Man Kim
Samsung Electronics
MS Dissertation : A Study on the plasma source ion implantation process for next-generation ULSI Devieces (2008.2)
Seung-Won Lee
SK Hynix
MS Dissertation : A Study on the Design and Characterization of Dielectric Mutilayer Stacks Prepared by atomic layer Deposition method (2008.2)
Kwang-Min Park
Samsung Electronics
MS Dissertation : A Study on the Atomic Layer Deposition of Copper Seed layer for Electroplating Using Cu(Ⅱ) Ketonate Precursors (2010.2)
PhD in Materials Science and Engineering, KAIST
Jae-Kyung Kim
Samsung Electronics
MS Dissertation : A Study on the Atomic Layer Deposition of silicon Oxide Thin Films Using Amino Silane Precursor (2011.2)
Kwangseon Jin
MS Dissertation : A Study on the Atomic Layer Deposition of Copper Seed Layer Using Bis(dimethylamino-methy-butoxy)copper precursor (2012.2)
Han-Gyul Lee
MS Dissertation : A Study on the Charge Trap Memory Device Prepared by Atomic layer Deposition Method (2013.2)
Hyun-Jeong Yoo
Metal-organic Compounds Materials Research Center, Sejong University
MS Dissertation : A Study on the Evaluation of Barrier Films Against Lithium Diffusion (2013.8)
Joo-Sun Hwang
MS Dissertation : A Study on the Analysis of Thermo-mechanical Stress in Through-silicon Via by Finite Element Method (2014.2)
Wan-Gyu Lim
MS Dissertation : A Study on the Atomic Layer Deposition of Cobalt Thin Films for Cobalt Silicide Formation (2016.2)
Seongyoon Kim
Samsung Electronics
MS Dissertation : A Study on the Atomic Layer Deposition of Titanium Dioxide Thin Films Using a Heteroleptic Titanium Precursor (2018.8)
Jaemin Kim
Samsung Electronics
MS Dissertation : A Study on the Atomic Layer Deposition of Titanium Oxide Thin Film Using Heteroleptic precursors (2019.2)
Yeongchan Choi
Samsung Electronics
MS Dissertation : Comparative Study on Silicon Precursors for
Atomic Layer Deposition of Silicon Oxide Thin Films (2021.2)
Hyeonsu Roh
Samsung Electronics
MS Dissertation : A Study on the Surface Reaction of Amino Silane Precursors in the Atomic Layer Deposition of Silicon Oxide Thin Films (2022.2)
Seung-Ho Seo
PhD Dissertation : A Study on the Failure of Copper Through-Silicon Via under Biased-Thermal stress (2012.8)
LuChana L. Yusup
Indonesia
- Modeling and simulation of ALD reactions - DFT, thermodynamics
PhD Dissertation : Density Functional Theory Study on the Atomic Layer Deposition of Silicon Nitride Thin Film (2017.2)
Tirta R. Mayangsari
Professor at Universitas Pertamina, Jakarta, Indonesia
- Modeling and simulation of ALD reactions - DFT, thermodynamics
PhD Dissertation : Reaction mechanism Study on Atomic Layer Deposition of Silicon Oxide with Catalyst or Inhibitor (2018.2)
Un-Jung Kim
LG Display
Ms Dissertation : A Study on the Characteristics of Silicon nitride Thin Films Prepared by Atomic Layer Deposition (2005.2)
Hye-Lee Kim
Metal-organic Compounds Materials Research Center, Sejong University
MS Dissertation : Study on the Adhesion properties and Immersion Behaviors of Hydroxyapatite Films Prepared by Pulsed Laser Deposition Method (2007.2)
PhD in Biomedical Engineering, Yonsei University
Young-Sun Kim
Family Business
MS Dissertation : Influences of the Sterilization on the Properties of Hydroxyapatite Coatings Prepared by Using pulsed Laser Deposition Method(2008.8)
Sung-Geun Kang
Hyundai Mobis
MS Dissertation : A study on the Characteristics of Cu(Mg) Thin Film for Gate Electrode Application of Thin Film Transistor (2009.2)
Byong-Jun Choi
Samsung Electronics
MS Dissertation : A Study on the Effects of Deposition Temperature and Oxidants on the Characteristics of Aluminum Oxide Thin Films Prepared by Atomic Layer Deposition Method (2010.2)
Hyungsuk Park
MS Dissertation : Study on the Yttria Stabilized zirconia Films Prepared by Pulsed Laser Deposition Method (2011.2)
Kyu Ha Choi
MS Dissertation : A Study on the Low-temperature Atomic Later Deposition of Cobalt Oxide Thin Films Using metal Organic Precursor and Ozone (2012.2)
Young-Jin Eun
Yuil Highest International patent & Law Firm
MS Dissertation : A Study on the Chemical Stability of Solid Electrolytes for lithium Secondary Batteries Applications (2013.8)
Sung-Joo Woo
MS Dissertation : Comparative Study on Silicon Precursors for Low-temperature Atomic Layer Deposition of Silicon Nitride Thin Film (2014.2)
Yong-Ho Noh
MS Dissertation : A study on Low-temperature Plasma-enhanced Atomic Layer Deposition of Silicon nitride Thin Films (2016.2)
Yu-Jin Kim
MS Dissertation : A study on the Atomic Layer Deposition of GeTe and Ge2Sb2Te5 Thin Films Using a Chlorine-free Ge(Ⅱ) Precursor (2016.2)
Jiyeon Gu
Samsung Electronics
MS Dissertation : A Study on the Area-selective Atomic Layer Deposition of Aluminum oxide Thin Film using Inhibitor (2019.2)
Hyeon-Ji Yun
Researcher: Finite element analysis - flexible electronics (2019.1~12.)
Kwonyoung Kim
Samsung Electronics
MS Dissertation : A Study on Composition Control of Ge-Sb-Te Thin Film for Phase-change Memory by Supercycle Atomic Layer Deposition (2022.2)
Donggeon Shin
Samsung Electronics
MS Dissertation : Analysis of Design Factors of Cyclone-Type Vaporizer for Increasing Supply of Atomic Layer Deposition Precursors Using Computational Fluid Dynamics (2022.2)