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Research Professor
Everything about ALD and ALE including
- In vacuo XPS analysis
- In situ FTIR/QCM analysis
Postdoc Fellow
- Modeling and simulation of ALD and ALE reactions
- DFT
PhD Course
- ALD of SiN, SiO2
- ALD of phase-change materials
- In situ QCM analysis
Master Course
- Hybrid bonding process simulation
- FEM
Integrated Master-PhD Course
- Modeling and simulation of ALE reactions
- DFT, MD
- ALE of High-K
- ALD of SiN
Administration
- R&D projects management
- Planning & strategy
- Modeling and simulation of ALD reactions
- Characterization of thin films
- ALD of III-N
- Electrical characterization of thin films
Undergraduate
- ALD process development